中国DUV制程推进,成本与良率限制显现
在ASML的EUV设备受出口限制之际,中国芯片厂正通过DUV多重曝光制造先进逻辑芯片,华为Kirin 9000S和Kirin 9030的拆解分析显示SMIC已取得进展。Tom’s Hardware援引专家称,增加掩模次数会提高套刻风险、制造时间、芯片面积和成本,SMIC的N+3工艺与台积电、三星成熟5nm工艺相比缩放仍有明显差距。Morgan Stanley估计,长鑫存储每片晶圆可生产的存储位数量约为西方竞争对手的三分之一,但报告也指出,美光曾借助DUV多重曝光和严格工艺控制成功生产DRAM。
该分析揭示中国在缺少EUV的情况下推进先进芯片制造所面临的成本、良率和密度限制,与先进处理器及AI芯片供应直接相关。
Export controls have kept ASML's most advanced EUV lithography machines out of China. Instead, the country's chipmaking industry has relied on less-capable deep ultraviolet (DUV) lithography machines. By using multiple exposures on critical chip layers, these older machines are still capable of producing performant silicon. However, as multiple patterns are applied there are more chances for defects, longer manufacturing times, and higher bills. We spoke to experts like Chris Mack, co-founder and CTO of semiconductor firm Fractilia, to find out how much further DUV can go.
For years, extreme ultraviolet (EUV) lithography has been seen as China’s biggest choke point in the country’s attempts to build cutting-edge chips. The machines, made exclusively by Dutch manufacturer ASML, use 13.5nm-wavelength light to print some of the most intricate features found on modern processors. Sales of ASML’s EUV systems are subject to export restrictions, forcing Chinese manufacturers to squeeze ever more out of older deep ultraviolet, or DUV, lithography instead. The EUV gap alone between China and the West is at least half a decade, according to some analysts.
#ASML#SMIC#Huawei#Kirin 9000S#Kirin 9030#TSMC#Samsung#Micron#CXMT#Fractilia#Morgan Stanley